검색결과 : 1건
No. | Article |
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1 |
MOCVD of tungsten nitride (WNx) thin films from the imido complex Cl-4(CH3CN)W((NPr)-Pr-i) Bchir OJ, Johnston SW, Cuadra AC, Anderson TJ, Ortiz CG, Brooks BC, Powell DH, McElwee-White L Journal of Crystal Growth, 249(1-2), 262, 2003 |