검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Photoreflectance characterization of ultrashallow junction activation in millisecond annealing Chism W, Current M, Vartanian V Journal of Vacuum Science & Technology B, 28(1), C1C15, 2010 |
| 2 |
Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor Clarysse T, Moussa A, Zangerle T, Schaus F, Vandervorst W, Faifer V, Current M Journal of Vacuum Science & Technology B, 26(1), 420, 2008 |
| 3 |
Papers from the Fourth International Workshop on the Measurement and Characterization of Ultra-shallow Doping Profiles in Semiconductors - 6-9 April 1997 MCNC, Center for Microelectronics Research Triangle Park, North Carolina - Preface Current M, Kump M, McGuire G Journal of Vacuum Science & Technology B, 16(1), 259, 1998 |