검색결과 : 25건
| No. | Article |
|---|---|
| 1 |
Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide Lohner T, Serenyi M, Szilagyi E, Zolnai Z, Czigany Z, Khanh NQ, Petrik P, Fried M Applied Surface Science, 421, 636, 2017 |
| 2 |
Homogeneous transparent conductive ZnO:Ga by ALD for large LED wafers Szabo Z, Baji Z, Basa P, Czigany Z, Barsony I, Wang HY, Volk J Applied Surface Science, 379, 304, 2016 |
| 3 |
Characterization of Defect Structure in Electrodeposited Nanocrystalline Ni Films Kolonits T, Jenei P, Toth BG, Czigany Z, Gubicza J, Peter L, Bakonyi I Journal of the Electrochemical Society, 163(3), D107, 2016 |
| 4 |
Reactive high power impulse magnetron sputtering of CFx thin films in mixed Ar/C4F4 and Ar/C4F8 discharges Schmidt S, Goyenola C, Gueorguiev GK, Jensen J, Greczynski G, Ivanov IG, Czigany Z, Hultman L Thin Solid Films, 542, 21, 2013 |
| 5 |
Structure and properties of phosphorus-carbide thin solid films Furlan A, Gueorguiev GK, Czigany Z, Darakchieva V, Braun S, Correia MR, Hogberg H, Hultman L Thin Solid Films, 548, 247, 2013 |
| 6 |
Intercalation of P atoms in Fullerene-like CPx Gueorguiev GK, Czigany Z, Furlan A, Stafstrom S, Hultman L Chemical Physics Letters, 501(4-6), 400, 2011 |
| 7 |
Optical and electrical characterization of aluminium doped ZnO layers Major C, Nemeth A, Radnoczi G, Czigany Z, Fried M, Labadi Z, Barsony I Applied Surface Science, 255(21), 8907, 2009 |
| 8 |
Spectroscopic ellipsometry characterization of amorphous carbon and amorphous, graphitic and fullerene-like carbon nitride thin films Berlind T, Furlan A, Czigany Z, Neidhardt J, Hultman L, Arwin H Thin Solid Films, 517(24), 6652, 2009 |
| 9 |
Structural and mechanical characterization of BCxNy thin films deposited by pulsed reactive magnetron sputtering Krause M, Bedel L, Taupeau A, Kreissig U, Munnik F, Abrasonis G, Kolitsch A, Radnoczi G, Czigany Z, Vanhulsel A Thin Solid Films, 518(1), 77, 2009 |
| 10 |
Homoepitaxial growth of Ti-Si-C MAX-phase thin films on bulk Ti3SiC2 substrates Eklund P, Murugaiah A, Emmerlich J, Czigany Z, Frodelius J, Barsoum MW, Hogberg H, Hultman L Journal of Crystal Growth, 304(1), 264, 2007 |