검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Reactive ion etching of Si by Cl and Cl-2 ions: Molecular dynamics simulations with comparisons to experiment Hanson DE, Kress JD, Voter AF Journal of Vacuum Science & Technology A, 17(4), 1510, 1999 |
| 2 |
Molecular dynamics simulations of Cl-2(+) impacts onto a chlorinated silicon surface: Energies and angles of the reflected Cl-2 and Cl fragments Helmer BA, Graves DB Journal of Vacuum Science & Technology A, 17(5), 2759, 1999 |
| 3 |
Molecular dynamics simulations of Ar+ and Cl+ impacts onto silicon surfaces : Distributions of reflected energies and angles Helmer BA, Graves DB Journal of Vacuum Science & Technology A, 16(6), 3502, 1998 |
| 4 |
Molecular-Dynamics Simulations of Fluorosilyl Species Impacting Fluorinated Silicon Surfaces with Energies from 0.1 to 100 eV Helmer BA, Graves DB Journal of Vacuum Science & Technology A, 15(4), 2252, 1997 |