검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Kinetic modeling and dopant effect on silicon deposition - Low pressure and plasma assisted chemical vapor deposition Masi M, Zonca R, Carra S Journal of the Electrochemical Society, 146(1), 103, 1999 |
| No. | Article |
|---|---|
| 1 |
Kinetic modeling and dopant effect on silicon deposition - Low pressure and plasma assisted chemical vapor deposition Masi M, Zonca R, Carra S Journal of the Electrochemical Society, 146(1), 103, 1999 |