검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inter-metal inorganic spin-on-glass dielectric layer in 100 nm generation technology Da Cheng M, Luoh T, Su CT, Yang TH, Chen KC, Lu CY Thin Solid Films, 516(23), 8726, 2008 |
| No. | Article |
|---|---|
| 1 |
Inter-metal inorganic spin-on-glass dielectric layer in 100 nm generation technology Da Cheng M, Luoh T, Su CT, Yang TH, Chen KC, Lu CY Thin Solid Films, 516(23), 8726, 2008 |