화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Microstructure of BN-C Films Deposited on Si Substrates by Reactive Sputtering from a B4C Target
Johansson MP, Hultman L, Daaud S, Bewilogua K, Luthje H, Schutze A, Kouptsidis S, Theunissen GS
Thin Solid Films, 287(1-2), 193, 1996
2 Preparation of Cubic Boron-Nitride Films by Use of Electrically Conductive Boron-Carbide Targets
Luthje H, Bewilogua K, Daaud S, Johansson M, Hultman L
Thin Solid Films, 257(1), 40, 1995