검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Diffusion of copper in titanium zirconium nitride thin films Kuo YL, Lee HH, Lee C, Lin JC, Shue SL, Liang MS, Daniels BJ Electrochemical and Solid State Letters, 7(3), C35, 2004 |
| 2 |
Growth of (Ti, Zr)N films on Si by DC reactive sputtering of TiZr in N2/Ar gas mixtures - Effect of flow ratio Kuo YL, Lee C, Lin JC, Peng CH, Chen LC, Hsieh CH, Shue SL, Liang MS, Daniels BJ, Huang CL, Lai CH Journal of the Electrochemical Society, 151(3), C176, 2004 |
| 3 |
Characteristics of DC reactively sputtered (Ti,Zr)N thin films as diffusion barriers for Cu metallization Kuo YL, Lee C, Lin JC, Peng CH, Chen LC, Hsieh CH, Shue SL, Liang MS, Daniels BJ, Huang CL, Lai CH Electrochemical and Solid State Letters, 6(9), C123, 2003 |
| 4 |
Enhanced Mechanical Hardness in Compositionally Modulated Fe(001)/Pt(001) and Fe(001)/Cr(001) Epitaxial Thin-Films Daniels BJ, Nix WD, Clemens BM Thin Solid Films, 253(1-2), 218, 1994 |