검색결과 : 2건
No. | Article |
---|---|
1 |
W-Nucleation on Tin from Wf6 and SiH4 Lantz SL, Bell AE, Ford WK, Danielson D Journal of Vacuum Science & Technology A, 12(4), 1032, 1994 |
2 |
Improvement of Depth Resolution in Secondary-Ion Mass-Spectrometry Depth Profiling of Silicided Poly Contacts Corcoran SF, Soza D, Kincaid N, Danielson D Journal of Vacuum Science & Technology B, 12(1), 230, 1994 |