검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
TaN metal gate etch mechanisms in BCl3-based plasmas Shamiryan D, Danila A, Baklanov MR, Boullart W Journal of Vacuum Science & Technology A, 28(2), 302, 2010 |
| No. | Article |
|---|---|
| 1 |
TaN metal gate etch mechanisms in BCl3-based plasmas Shamiryan D, Danila A, Baklanov MR, Boullart W Journal of Vacuum Science & Technology A, 28(2), 302, 2010 |