검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Electron-Cyclotron-Resonance Plasma-Etching of Native TiO2 on Tin Day ME, Delfino M Journal of the Electrochemical Society, 143(1), 264, 1996 |
| 2 |
Correlation of Electrical-Resistivity and Grain-Size in Sputtered Titanium Films Day ME, Delfino M, Fair JA, Tsai W Thin Solid Films, 254(1-2), 285, 1995 |
| 3 |
Silicon Surface Electrical-Properties After Low-Temperature in-Situ Cleaning Using an Electron-Cyclotron-Resonance Plasma Nam CW, Ashok S, Tsai W, Day ME Journal of Vacuum Science & Technology B, 12(5), 3010, 1994 |