검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Modeling of Reactive Sputtering of Compound Films in the Presence of Bias Sputtering Wautelet M, Debal F, Dauchot JP, Hecq M Journal of Vacuum Science & Technology A, 13(5), 2600, 1995 |
| No. | Article |
|---|---|
| 1 |
Modeling of Reactive Sputtering of Compound Films in the Presence of Bias Sputtering Wautelet M, Debal F, Dauchot JP, Hecq M Journal of Vacuum Science & Technology A, 13(5), 2600, 1995 |