검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Generation of subquarter-micron resist structures using optical interference lithography and image reversal Decker JY, Fernandez A, Sweeney DW Journal of Vacuum Science & Technology B, 15(6), 1949, 1997 |
| 2 |
Methods for fabricating arrays of holes using interference lithography Fernandez A, Decker JY, Herman SM, Phillion DW, Sweeney DW, Perry MD Journal of Vacuum Science & Technology B, 15(6), 2439, 1997 |