화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
Ou YX, Chen H, Li ZY, Lin J, Pan W, Lei MK
Journal of the American Ceramic Society, 101(11), 5166, 2018
2 Deposition of AlN films for acoustic biosensors by deep oscillation magnetron sputtering: effect of bias voltage
Melo-Maximo L, Lin J, Murillo AE, Salas O, Oliva-Ramirez J, Oseguera J, Garcia-Farrera B, Melo-Maximo D
Thin Solid Films, 664, 83, 2018
3 Wear and corrosion resistance of CrN/TiN superlattice coatings deposited by a combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering
Ou YX, Lin J, Tong S, Che HL, Sproul WD, Lei MK
Applied Surface Science, 351, 332, 2015
4 Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering
Ou YX, Lin J, Che HL, Moore JJ, Sproul WD, Lei MK
Thin Solid Films, 594, 147, 2015