검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-throughput, high-spatial-frequency measurement of critical dimension variations using memory circuits as electrical test structures Ouyang X, Deeter TL, Berglund CN, McCord MA, Pease RFW Journal of Vacuum Science & Technology B, 17(6), 2707, 1999 |