검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Epitaxial growth of Si by tow-energy DC-plasma chemical vapor deposition Mateeva E, Deller HR, Kafader U, Rosenblad C, Von Kanel H, Dommann A Journal of Materials Science Letters, 17(18), 1545, 1998 |
| 2 |
Silicon epitaxy by low-energy plasma enhanced chemical vapor deposition Rosenblad C, Deller HR, Dommann A, Meyer T, Schroeter P, von Kanel H Journal of Vacuum Science & Technology A, 16(5), 2785, 1998 |
| 3 |
Low-temperature heteroepitaxy by LEPECVD Rosenblad C, Deller HR, Dobeli M, Muller E, von Kanel H Thin Solid Films, 318(1-2), 11, 1998 |