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| No. | Article |
|---|---|
| 1 |
Role of Etch Pattern Fidelity in the Printing of Optical Proximity Corrected Photomasks Kornblit A, Demarco JJ, Garofalo J, Mixon DA, Novembre AE, Vaidya S, Kook T Journal of Vacuum Science & Technology B, 13(6), 2944, 1995 |