검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
At-wavelength alignment and testing of the 0.3 NA MET optic Goldberg KA, Naulleau PP, Denham PE, Rekawa SB, Jackson K, Anderson EH, Liddle JA Journal of Vacuum Science & Technology B, 22(6), 2956, 2004 |
| 2 |
Preparations for extreme ultraviolet interferometry of the 0.3 numerical aperture Micro Exposure Tool optic Goldberg KA, Naulleau PP, Denham PE, Rekawa SB, Jackson KH, Liddle JA, Harteneck B, Gullikson E, Anderson EH Journal of Vacuum Science & Technology B, 21(6), 2706, 2003 |
| 3 |
At-wavelength characterization of the extreme ultraviolet Engineering Test Stand Set-2 optic Naulleau P, Goldberg KA, Anderson EH, Batson P, Denham PE, Jackson KH, Gullikson EM, Rekawa S, Bokor J Journal of Vacuum Science & Technology B, 19(6), 2396, 2001 |
| 4 |
At-wavelength interferometry for extreme ultraviolet lithography Tejnil E, Goldberg KA, Lee SH, Medecki H, Batson PJ, Denham PE, MacDowell AA, Bokor J, Attwood D Journal of Vacuum Science & Technology B, 15(6), 2455, 1997 |