검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Charging Effects in Plasma Immersion Ion-Implantation for Microelectronics Qin S, Bernstein JD, Zhao ZF, Liu W, Chan C, Shao JQ, Denholm S Journal of Vacuum Science & Technology B, 13(5), 1994, 1995 |
| No. | Article |
|---|---|
| 1 |
Charging Effects in Plasma Immersion Ion-Implantation for Microelectronics Qin S, Bernstein JD, Zhao ZF, Liu W, Chan C, Shao JQ, Denholm S Journal of Vacuum Science & Technology B, 13(5), 1994, 1995 |