검색결과 : 1건
No. | Article |
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1 |
Influence of gate patterning on line edge roughness Leunissen LHA, Jonckheere R, Ronse K, Derksen GB Journal of Vacuum Science & Technology B, 21(6), 3140, 2003 |
No. | Article |
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1 |
Influence of gate patterning on line edge roughness Leunissen LHA, Jonckheere R, Ronse K, Derksen GB Journal of Vacuum Science & Technology B, 21(6), 3140, 2003 |