검색결과 : 1건
No. | Article |
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1 |
Comparative study of thin film physical properties for TiNx deposited by DC magnetron sputtering under temperatures less than 100 degrees C on monocrystalline silicon and polycrystalline iron substrates Roquiny P, Poulet A, Leys Y, Descamps JC, Bodart F, VandenBrande P Thin Solid Films, 355-356, 357, 1999 |