검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Kinetic and gas-phase study of the chemical vapor deposition of silicon carbide from C2H3SiCl3/H2 Desenfant A, Laduye G, Vignoles GL, Chollon G Journal of Industrial and Engineering Chemistry, 94, 145, 2021 |
| No. | Article |
|---|---|
| 1 |
Kinetic and gas-phase study of the chemical vapor deposition of silicon carbide from C2H3SiCl3/H2 Desenfant A, Laduye G, Vignoles GL, Chollon G Journal of Industrial and Engineering Chemistry, 94, 145, 2021 |