검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Reverse selectivity - High silicon nitride and low silicon dioxide removal rates using ceria abrasive-based dispersions Dandu PRV, Devarapalli VK, Babu SV Journal of Colloid and Interface Science, 347(2), 267, 2010 |
| 2 |
Selective removal of 10-40-nm particles from silicon wafers using laser-induced plasma shockwaves Peri MDM, Devarapalli VK, Cetinkaya C Journal of Adhesion Science and Technology, 21(3-4), 331, 2007 |
| 3 |
Synergistic roles of dodecyl sulfate and benzotriazole in enhancing the efficiency of CMP of copper Hong Y, Devarapalli VK, Roy D, Babu SV Journal of the Electrochemical Society, 154(6), H444, 2007 |
| 4 |
Particle removal with liquid-film-enhanced laser-induced plasma Devarapalli VK, Peri MDM, Cetinkaya C Journal of Adhesion Science and Technology, 20(2-3), 233, 2006 |
| 5 |
Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasma Devarapalli VK, Li Y, Cetinkaya C Journal of Adhesion Science and Technology, 18(7), 779, 2004 |