검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of AL-Y alloy thin films deposited by direct current magnetron sputtering Liu Y, Singh R, Poole K, Diefendorf RJ, Harriss J, Cannon K Journal of Vacuum Science & Technology B, 15(6), 1990, 1997 |
| 2 |
Characterization of Al-1 wt% Y thin films for VLSI interconnects Liu Y, Poole KF, Singh R, Harriss J, Diefendorf RJ Thin Solid Films, 308-309, 460, 1997 |