검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structuring of GaAs. I. Chemical dry etching: Temperature and chlorine pressure dependence of etch rates Dienelt J, von Sonntag J, Zimmer K, Rauschenbach B Journal of Vacuum Science & Technology B, 22(4), 1964, 2004 |
| 2 |
Investigations of different dry etching methods on LaAlO3 Dienelt J, Zimmer K, Bigl F, Hohne R Journal of Vacuum Science & Technology A, 17(5), 2531, 1999 |