검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Al2O3 thin films prepared by plasma-enhanced chemical vapor deposition of dimethylaluminum isopropoxide Ban W, Kwon S, Nam J, Yang J, Jang S, Jung D Thin Solid Films, 641, 47, 2017 |
| 2 |
Carbon incorporation in chemical vapor deposited aluminum oxide films Schmidt BW, Rogers BR, Gren CK, Hanusa TP Thin Solid Films, 518(14), 3658, 2010 |
| 3 |
Thermal decomposition of dimethylaluminum isopropoxide on Si(100) Lee SY, Luo B, Sun YM, White JM, Kim YS Applied Surface Science, 222(1-4), 234, 2004 |