화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Reduction of laser-induced roughness in a-Si : H surfaces for vacuum compatible lithography
Jacobs RN, Robinson EW, Stoltz AJ, Dinan JH, Salamanca-Riba L
Journal of Vacuum Science & Technology A, 24(4), 1684, 2006
2 Characterization of a-Si : H resists for a vacuum-compatible photolithography process
Jacobs RN, Stoltz AJ, Dinan JH, Salamanca-Riba L
Journal of Vacuum Science & Technology B, 22(3), 1141, 2004
3 Reduced carbon contaminant, low-temperature silicon substrate preparation for "defect-free" homoepitaxy
Taylor PJ, Jesser WA, Martinka M, Singley KM, Dinan JH, Lareau RT, Wood MC, Clark WW
Journal of Vacuum Science & Technology A, 17(4), 1153, 1999
4 Development of a parametric optical constant model for Hg1-xCdxTe for control of composition by spectroscopic ellipsometry during MBE growth
Johs B, Herzinger CM, Dinan JH, Cornfeld A, Benson JD
Thin Solid Films, 313-314, 137, 1998
5 Real-time monitoring and control of epitaxial semiconductor growth in a production environment by in situ spectroscopic ellipsometry
Johs B, Herzinger C, Dinan JH, Cornfeld A, Benson JD, Doctor D, Olson G, Ferguson I, Pelczynski M, Chow P, Kuo CH, Johnson S
Thin Solid Films, 313-314, 490, 1998
6 Heteroepitaxy of CdTe on (211)Si Using Crystallized Amorphous ZnTe Templates
Dhar NK, Wood CE, Gray A, Wei HY, Salamancariba L, Dinan JH
Journal of Vacuum Science & Technology B, 14(3), 2366, 1996