검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography Brose S, Danylyuk S, Juschkin L, Dittberner C, Bergmann K, Moers J, Panaitov G, Trellenkamp S, Loosen P, Grutzmacher D Thin Solid Films, 520(15), 5080, 2012 |