검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Impact of Out-of-Plane Translational Order in Block Copolymer Lithography Bosworth JK, Dobisz EA, Hellwig O, Ruiz R Macromolecules, 44(23), 9196, 2011 |
| 2 |
Effects of molecular properties on nanolithography in polymethyl methacrylate Dobisz EA, Brandow SL, Bass R, Mitterender J Journal of Vacuum Science & Technology B, 18(1), 107, 2000 |
| 3 |
Nanolithography in polymethylmethacrylate: An atomic force microscope study Dobisz EA, Brandow SL, Bass R, Shirey LM Journal of Vacuum Science & Technology B, 16(6), 3695, 1998 |
| 4 |
Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601 Dobisz EA, Fedynyshyn TN, Ma D, Shirey LM, Bass R Journal of Vacuum Science & Technology B, 16(6), 3773, 1998 |
| 5 |
Atomic force microscope studies of nanolithographic exposure and development of polymethylmethacrylate Dobisz EA, Brandow SL, Snow E, Bass R Journal of Vacuum Science & Technology B, 15(6), 2318, 1997 |
| 6 |
Control in sub-100 nm lithography in SAL-601 Dobisz EA, Marrian CRK Journal of Vacuum Science & Technology B, 15(6), 2327, 1997 |
| 7 |
Modeling of Electron Elastic and Inelastic-Scattering Marrian CR, Perkins FK, Park D, Dobisz EA, Peckerar MC, Rhee KW, Bass R Journal of Vacuum Science & Technology B, 14(6), 3864, 1996 |
| 8 |
3-Dimensional Electron-Optical Modeling of Scanning Tunneling Microscope Lithography in Resists Dobisz EA, Koops HW, Perkins FK, Marrian CR, Brandow SL Journal of Vacuum Science & Technology B, 14(6), 4148, 1996 |
| 9 |
Spectroscopic Characterization of Self-Assembled Organosilane Monolayer Films Perkins FK, Dobisz EA, Marrian CR, Brandow SL Journal of Vacuum Science & Technology B, 13(6), 2841, 1995 |
| 10 |
Effects of Etch Chemistry on SF6-Based Tungsten Etching by Electron-Cyclotron-Resonance Reactive Ion Etching Eddy CR, Kosakowski J, Shirey LM, Dobisz EA, Rhee KW, Chu W, Foster KW, Marrian CR, Peckerar MC Journal of Vacuum Science & Technology B, 12(6), 3351, 1994 |