검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Mechanisms of Deposition of SiO2 from Teos and Related Organosilicon Compounds and Ozone Dobkin DM, Mokhtari S, Schmidt M, Pant A, Robinson L, Sherman A Journal of the Electrochemical Society, 142(7), 2332, 1995 |
| No. | Article |
|---|---|
| 1 |
Mechanisms of Deposition of SiO2 from Teos and Related Organosilicon Compounds and Ozone Dobkin DM, Mokhtari S, Schmidt M, Pant A, Robinson L, Sherman A Journal of the Electrochemical Society, 142(7), 2332, 1995 |