검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Quantitative two-dimensional profiling of 0.35 mu m transistors with lightly doped drain structures McDonald A, Mahaffy R, Wang XD, Kuklewicz C, Shih CK, Dennis M, Tiffin D, Kadoch D, Duane M Journal of Vacuum Science & Technology B, 18(1), 572, 2000 |
| 2 |
Metal-oxide-semiconduct or field-effect transistor junction requirements Duane M, Lynch W Journal of Vacuum Science & Technology B, 16(1), 306, 1998 |
| 3 |
Dopant Profile Control and Metrology Requirements for Sub-0.5 Mu-M Metal-Oxide-Semiconductor Field-Effect Transistors Duane M, Nunan P, Terbeek M, Subrahmanyan R Journal of Vacuum Science & Technology B, 14(1), 218, 1996 |