검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Accuracy of Thin-Film Stress Measurements with C-Si Microbeams Fabricated by Dry-Etching Boutry M, Bosseboeuf A, Bourouina T, Grandchamp JP, Dufourgergam E, Gilles JP Journal of Vacuum Science & Technology B, 15(5), 1767, 1997 |
| 2 |
Electrical-Properties of Silicon-Nitride Films Grown on a SiGe Layer by Distributed Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition Dufourgergam E, Meyer F, Delmotte F, Hugon MC, Agius B, Warren P, Dutartre D Thin Solid Films, 294(1-2), 214, 1997 |