검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications Fu XA, Dunning JL, Mehregany M, Zorman CA Journal of the Electrochemical Society, 158(6), H675, 2011 |
| 2 |
Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition Fu XA, Dunning JL, Zorman CA, Mehregany M Thin Solid Films, 492(1-2), 195, 2005 |