검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of Silicon Transport in the Neutral Background of a Plasma Activated Reactive Evaporation System Higgins B, Durandet A, Boswell R Journal of Vacuum Science & Technology B, 13(2), 192, 1995 |
| 2 |
Deposition of Silicon Dioxide Films Using the Helicon Diffusion Reactor for Integrated-Optics Applications Giroultmatlakowski G, Charles C, Durandet A, Boswell RW, Armand S, Persing HM, Perry AJ, Lloyd PD, Hyde SR, Bogsanyi D Journal of Vacuum Science & Technology A, 12(5), 2754, 1994 |