검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
A Simple Optical-Emission Method for Measuring Percent Dissociations of Feed Gases in Plasmas - Application to Cl-2 in a High-Density Helical Resonator Plasma Donnelly VM Journal of Vacuum Science & Technology A, 14(3), 1076, 1996 |