검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Energy distribution of ions bombarding biased electrodes in high density plasma reactors Edelberg EA, Perry A, Benjamin N, Aydil ES Journal of Vacuum Science & Technology A, 17(2), 506, 1999 |
| 2 |
Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces Marra DC, Edelberg EA, Naone RL, Aydil ES Journal of Vacuum Science & Technology A, 16(6), 3199, 1998 |