검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma Processes in Methane Discharges During RF Plasma-Assisted Chemical-Vapor-Deposition of A-CH Thin-Films Dekempeneer EH, Smeets J, Meneve J, Eersels L, Jacobs R Thin Solid Films, 241(1-2), 269, 1994 |
| No. | Article |
|---|---|
| 1 |
Plasma Processes in Methane Discharges During RF Plasma-Assisted Chemical-Vapor-Deposition of A-CH Thin-Films Dekempeneer EH, Smeets J, Meneve J, Eersels L, Jacobs R Thin Solid Films, 241(1-2), 269, 1994 |