검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Application of scatterometric porosimetry to characterize porous ultra low-k patterned layers Licitra C, Bouyssou R, El Kodadi M, Haberfehlner G, Chevolleau T, Hazart J, Virot L, Besacier M, Schiavone P, Bertin F Thin Solid Films, 519(9), 2825, 2011 |
| 2 |
Scatterometric porosimetry: A new characterization technique for porous material patterned structures Bouyssou R, El Kodadi M, Licitra C, Chevolleau T, Besacier M, Posseme N, Joubert O, Schiavone P Journal of Vacuum Science & Technology B, 28(4), L31, 2010 |
| 3 |
Real time scatterometry for profile control during resist trimming process El Kodadi M, Soulan S, Besacier M, Schiavone P Journal of Vacuum Science & Technology B, 27(6), 3232, 2009 |
| 4 |
Inhibitive action of two bipyrazolic isomers towards corrosion of steel in 1 M HCl solution Tebbji K, Oudda H, Hammouti B, Benkaddour M, El kodadi M, Malek F, Ramdani A Applied Surface Science, 241(3-4), 326, 2005 |