검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Reduction of copper oxide film to elemental copper Soininen PJ, Elers KE, Saanila V, Kaipio S, Sajavaara T, Haukka S Journal of the Electrochemical Society, 152(2), G122, 2005 |
| 2 |
TiCl4 as a precursor in the TiN deposition by ALD and PEALD Elers KE, Winkler J, Weeks K, Marcus S Journal of the Electrochemical Society, 152(8), G589, 2005 |
| 3 |
Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates Elers KE, Saanila V, Li WM, Soininen PJ, Kostamo JT, Haukka S, Juhanoja J, Besling WFA Thin Solid Films, 434(1-2), 94, 2003 |