검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of structural and microstructural properties of AIN films deposited on silicon and quartz substrates for surface acoustic wave devices Assouar MB, Elmazria O, Elhakiki M, Alnot P Journal of Vacuum Science & Technology B, 22(4), 1717, 2004 |