화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 High density germanium nanowire assemblies: Contact challenges and electrical characterization
Erts D, Polyakov B, Dalyt B, Morris MA, Ellingboe S, Boland J, Holmes JD
Journal of Physical Chemistry B, 110(2), 820, 2006
2 Etching of organic low dielectric constant material SiLK (TM) on the Lam Research Corporation 4520XLE (TM)
Janowiak C, Ellingboe S, Morey I
Journal of Vacuum Science & Technology A, 18(4), 1859, 2000