| 1 |
Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films
Godavarthi S, Wang C, Verdonck P, Matsumoto Y, Koudriavtsev I, Dutt A, Tielens H, Baklanov MR
Thin Solid Films, 575, 103, 2015 |
| 2 |
The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers
Perrotta A, Aresta G, van Beekum ERJ, Palmans J, van de Weijer P, van de Sanden MCMR, Kessels WMME, Creatore M
Thin Solid Films, 595, 251, 2015 |
| 3 |
A comprehensive study of the reaction parameters involved in the synthesis of Silica thin films with well-ordered uni-directional mesopores
Collard X, Van der Schueren B, Rooke JC, Aprile C, Su BL
Journal of Colloid and Interface Science, 401, 23, 2013 |
| 4 |
Characterization of stacked sol-gel films: Comparison of results derived from scanning electron microscopy, UV-vis spectroscopy and ellipsometric porosimetry
Bittner A, Schmitt A, Jahn R, Lobmann P
Thin Solid Films, 520(6), 1880, 2012 |
| 5 |
Sorption and optical properties of sol-gel thin films measured by X-Ray Reflectometry and Ellipsometric Porosimetry
Fuertes MC, Barrera MP, Pla J
Thin Solid Films, 520(15), 4853, 2012 |
| 6 |
Photocatalytic degradation of TCE in dry and wet air conditions with TiO2 porous thin films
Suarez S, Arconada N, Castro Y, Coronado JM, Portela R, Duran A, Sanchez B
Applied Catalysis B: Environmental, 108(1-2), 14, 2011 |
| 7 |
Application of scatterometric porosimetry to characterize porous ultra low-k patterned layers
Licitra C, Bouyssou R, El Kodadi M, Haberfehlner G, Chevolleau T, Hazart J, Virot L, Besacier M, Schiavone P, Bertin F
Thin Solid Films, 519(9), 2825, 2011 |
| 8 |
Validity of Lorentz-Lorenz equation in porosimetry studies
Schwarz D, Wormeester H, Poelsema B
Thin Solid Films, 519(9), 2994, 2011 |
| 9 |
Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH films
Licitra C, Bouyssou R, Chevolleau T, Bertin F
Thin Solid Films, 518(18), 5140, 2010 |
| 10 |
Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering
Jousseaume V, Rolland G, Babonneau D, Simon JP
Applied Surface Science, 254(2), 473, 2007 |
