검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O-2/Ar gas mixtures Lee JY, Choi JS, Cho DH, Hwang SM, Chung CW Thin Solid Films, 636, 325, 2017 |
| No. | Article |
|---|---|
| 1 |
Dry etching of palladium thin films in high density plasmas of CH3OH/Ar, C2H5OH/Ar, CH4/Ar, and CH4/O-2/Ar gas mixtures Lee JY, Choi JS, Cho DH, Hwang SM, Chung CW Thin Solid Films, 636, 325, 2017 |