검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Si/Xef2 Etching - Temperature-Dependence Vugts MJ, Verschueren GL, Eurlings MF, Hermans LJ, Beijerinck HC Journal of Vacuum Science & Technology A, 14(5), 2766, 1996 |
| 2 |
Si/Xef2 Etching - Reaction Layer Dynamics and Surface Roughening Vugts MJ, Eurlings MF, Hermans LJ, Beijerinck HC Journal of Vacuum Science & Technology A, 14(5), 2780, 1996 |