검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low-resistance silicon-germanium contact technology for modular integration of MEMS with electronics Eyoum MA, King TJ Journal of the Electrochemical Society, 151(3), J21, 2004 |
| 2 |
Low resistance silicon-germanium contact technology for modular integration of MEMS with electronics (vol 151, pg J21, 2004) Eyoum MA, King TJ Journal of the Electrochemical Society, 151(7), L5, 2004 |