검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
(ME5C5)SIH3 AND (ME5C5)2SIH2 AS PRECURSORS FOR LOW-TEMPERATURE REMOTE PLASMA-ENHANCED CVD OF THIN SI3N4 AND SIO2-FILMS DAHLHAUS J, JUTZI P, FRENCK HJ, KULISCH W Advanced Materials, 5(5), 377, 1993 |
| No. | Article |
|---|---|
| 1 |
(ME5C5)SIH3 AND (ME5C5)2SIH2 AS PRECURSORS FOR LOW-TEMPERATURE REMOTE PLASMA-ENHANCED CVD OF THIN SI3N4 AND SIO2-FILMS DAHLHAUS J, JUTZI P, FRENCK HJ, KULISCH W Advanced Materials, 5(5), 377, 1993 |