화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS
Py M, Saracco E, Damlencourt JF, Barnes JP, Fabbri JM, Hartmann JM
Applied Surface Science, 257(22), 9414, 2011
2 Chemical and Structural Properties of a TaN/HfO2 Gate Stack Processed Using Atomic Vapor Deposition
Gaumer C, Martinez E, Lhostis S, Wiemer C, Perego M, Loup V, Lafond D, Fabbri JM
Journal of the Electrochemical Society, 156(7), G78, 2009