검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers Seghete D, Fabreguette FH, George SM Thin Solid Films, 519(11), 3612, 2011 |
| 2 |
Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl) manganese and H2O Burton BB, Fabreguette FH, George SM Thin Solid Films, 517(19), 5658, 2009 |
| 3 |
X-ray mirrors on flexible polymer substrates fabricated by atomic layer deposition Fabreguette FH, George SM Thin Solid Films, 515(18), 7177, 2007 |
| 4 |
Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 Fabreguette FH, Sechrist ZA, Elam JW, George SM Thin Solid Films, 488(1-2), 103, 2005 |
| 5 |
Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates Groner MD, Elam JW, Fabreguette FH, George SM Thin Solid Films, 413(1-2), 186, 2002 |