검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane Shayapov VR, Rumyantsev YM, Dzyuba AA, Ayupov BM, Fainer NI Applied Surface Science, 265, 385, 2013 |
| 2 |
Silicon carbonitride nanolayers - Synthesis and chemical characterization Hoffmann PS, Fainer NI, Baake O, Kosinova ML, Rumyantsev YM, Trunova VA, Klein A, Pollakowski B, Beckhoff B, Ensinger W Thin Solid Films, 520(18), 5906, 2012 |
| 3 |
Structure and phase composition study of thin CdS and CdxZn1-xS films Maximovski EA, Fainer NI, Rumyantsev YM Materials Science Forum, 443-4, 197, 2004 |
| 4 |
Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia Fainer NI, Rumyantsev YM, Golubenko AN, Kosinova ML, Kuznetsov FA Journal of Crystal Growth, 248, 175, 2003 |
| 5 |
A study of the thermal annealing influence on the structure and phase composition of silicon carbonitride films by the diffraction of synchrotron radiation Fainer NI, Maximovski EA, Kosinova ML, Rumyantsev YM Materials Science Forum, 378-3, 493, 2001 |
| 6 |
Growth of PbS and CdS Thin-Films by Low-Pressure Chemical-Vapor-Deposition Using Dithiocarbamates Fainer NI, Kosinova ML, Rumyantsev YM, Salman EG, Kuznetsov FA Thin Solid Films, 280(1-2), 16, 1996 |
| 7 |
Plasma-Deposited CdS Layers from (O-Phen)bis(Diethyldithiocarbamate) Cadmium Fainer NI, Rumyantsev YM, Salman EG, Kosinova ML, Yurjev GS, Sysoeva NP, Maximovskii EA, Sysoev SV, Golubenko AN Thin Solid Films, 286(1-2), 122, 1996 |
| 8 |
Chemical-Stability of Hydrogen-Containing Boron-Nitride Films Obtained by Plasma-Enhanced Chemical-Vapor-Deposition Akkerman ZL, Kosinova ML, Fainer NI, Rumjantsev YM, Sysoeva NP Thin Solid Films, 260(2), 156, 1995 |