검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
An Atomic-Force Microscopy Study on the Roughness of Silicon-Wafers Correlated with Direct Wafer Bonding Roberds BE, Farrens SN Journal of the Electrochemical Society, 143(7), 2365, 1996 |
| 2 |
Chemical Free Room-Temperature Wafer to Wafer Direct Bonding Farrens SN, Dekker JR, Smith JK, Roberds BE Journal of the Electrochemical Society, 142(11), 3949, 1995 |
| 3 |
The Effects of Process-Induced Defects on the Chemical Selectivity of Highly Doped Boron Etch Stops in Silicon Desmond CA, Hunt CE, Farrens SN Journal of the Electrochemical Society, 141(1), 178, 1994 |
| 4 |
Low-Temperature Wafer Bonding of Surfaces Using a Reactive Sputtered Oxide Folta JA, Hunt CE, Farrens SN Journal of the Electrochemical Society, 141(8), 2157, 1994 |
| 5 |
A Kinetics Study of the Bond Strength of Direct-Bonded Wafers Farrens SN, Hunt CE, Roberds BE, Smith JK Journal of the Electrochemical Society, 141(11), 3225, 1994 |